AXCELIS TECHNOLOGIES INC

For the period ended Dec 31, 2025. Filed Feb 26, 2026.

About this filing

A company's yearly report to the SEC, with audited financial statements. It is the fullest account a company gives of its business, its finances and the risks it sees.

FY2025 · Filed Feb 26, 2026

ACLS$106.79-0.8%Stored close · as of Nov 10, 2026

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Contents

Item 4. Mine Safety Disclosures

Not applicable.

Part II

Our common stock trades on the Nasdaq Global Select Market under the symbol ACLS. As of February 23, 2026, we had approximately 567 stockholders of record.

The following table summarizes the stock repurchase activity for the 12 months ended December 31, 2025 pursuant to our stock repurchase program:


· · Total Number of Shares Purchased · · Average Price Paid per Share · · Total Number of Shares Purchased as Part of Publicly Announced Program · · Approximate Dollar Value of Shares that May Yet Be Purchased Under the Program ·
· · (in thousands except per share amounts) ·
January 1 through January 31	163	$71.10	163	$118,388
February 1 through February 28	54	$62.05	54	115,012
March 1 through March 31	57	$56.14	57	211,834	(1)
April 1 through April 30	360	$46.42	360	195,124
May 1 through May 31	297	$57.87	297	177,921
June 1 through June 30	169	$64.34	169	167,031
July 1 through July 31	237	$73.13	237	149,707
August 1 through August 31	136	$78.25	136	139,026
September 1 through September 30	50	$80.60	50	135,014
October 1 through October 31	172	$83.55	172	120,643
November 1 through November 30	132	$81.09	132	110,014
December 1 through December 31	—		—	110,014
Total	1,827		1,827

(1) The increase in the dollar value available for repurchases under the program at March 31, 2025 reflects the additional funding authorized under the program in March 2025.

We currently maintain one equity compensation plan, the 2012 Equity Incentive Plan (the “2012 Equity Plan”). The number of shares issuable upon vesting of outstanding restricted stock units granted to employees and non-employee directors, as well as the number of shares remaining available for future issuance, under the 2012 Equity Plan and our 2020 Employee Stock Purchase Plan as of December 31, 2025 are summarized in the following table:

· · · · ·
	(A)	(B)	(C)
Plan category · · · Number of shares to be issued upon exercise of outstanding options, warrants and rights (1) · Weighted‑average exercise price of outstanding options, warrants and rights (2) · Number of shares remaining available for future issuance under equity compensation plans (excluding shares reflected in column (A)) (3)
Equity compensation plans approved by stockholders	704,128	$ -	1,544,682
Equity compensation plans not approved by stockholders	—	N/A	N/A
Total	704,128		1,544,682

(1) Represents 704,128 shares issuable on vesting of outstanding restricted stock units under the 2012 Equity Plan (some of which will be withheld in respect of tax withholding obligations).
(2) For the purposes of this table, the weighted-average exercise price of outstanding options, warrants and rights includes restricted stock units as if they had a $0.00 exercise price.
(3) Represents the total shares available for issuance under our 2012 Equity Plan and our 2020 Employee Stock Purchase Plan, as of December 31, 2025, as follows:
(A)	2,740,236 shares were available for future issuance under the 2012 Equity Plan. Such amount represents the total number of shares reserved for issuance under the 2012 Equity Plan ((10,762,500 shares approved by the shareholders, plus 1,777,029 shares added in accordance with the terms of the 2012 Equity Plan as a result of the expiration or forfeiture of awards granted under our prior equity grant plan that were outstanding at the time of the adoption of the 2012 Equity Plan), less the shares issuable on options and restricted stock units (counted at 1.5 shares each) outstanding under the 2012 Equity Plan included in column (A)) and the shares issued prior to such date on exercise of options and vesting of restricted stock units granted under the 2012 Equity Plan. This plan is generally used for grants to employees and directors and was initially approved by our stockholders at our 2012 annual meeting.
(B)	840,554 shares were available under our 2020 Employee Stock Purchase Plan, which represents the total number of shares reserved for issuance under the plan (1,000,000) less the shares purchased through December 31, 2025.

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